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AL-SB-TE PHASE CHANGE MATERIAL USED FOR PHASE CHANGE MEMORY

[Category : - OTHER]
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The present invention discloses an Al-Sb-Te phase change material used for PCM and fabrication method thereof. Said phase change material, which can be prepared by PVD, CVD, ALD, PLD, EBE, and ED, is a mixture of three elements aluminum (Al), antimony (Sb) and tellurium (Te) with a general formula of Alx(SbyTe1)1-x, where 0







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